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Capecchi, Simone; Atanasova, Tanya; Willeke, Reiner; Parthenopoulos, Michael; Pizzetti, Christian; Daviot, Jerome . (2016). Low Undercut Ti Etch Chemistry for Cu Bump Pillar under Bump Metallization Wet Etch Process. Solid State Phenomena, 255(), 291–296. doi:10.4028/www.scientific.net/SSP.255.291 
10.4028/www.scientific.net/SSP.255.291