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Spuller, M. T.; Perchuk, R. S.; Hess, D. W. . (2005).
Evaluating Photoresist Dissolution, Swelling, and Removal with an In Situ Film Refractive Index and Thickness Monitor. Journal of The Electrochemical Society, 152(1), G40–.
doi:10.1149/1.1817716
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